#[non_exhaustive]pub enum RecipeStep {
GasStabilize,
MainEtch,
Deposition,
OverEtch,
Seasoning,
Other(String),
}Expand description
Canonical set of recipe steps recognised by the DSFB engine.
Fabs that use non-standard step names should map their internal identifiers
to the closest canonical variant via RecipeStep::from_str.
Variants (Non-exhaustive)§
This enum is marked as non-exhaustive
GasStabilize
Pre-etch gas stabilisation — MFC setpoints ramp; relaxed tolerances apply because transient overshoots are physically expected.
MainEtch
Main active etch — tight tolerances; this is the yield-critical window.
Deposition
Deposition step — moderate tolerances.
OverEtch
Post-etch over-etch — slightly relaxed tolerances.
Seasoning
Chamber conditioning after maintenance — widest tolerances.
Other(String)
Any step not explicitly classified; baseline tolerances apply.
Implementations§
Source§impl RecipeStep
impl RecipeStep
Sourcepub fn from_str(s: &str) -> Self
pub fn from_str(s: &str) -> Self
Parse a step name string into the canonical variant. Matching is
case-insensitive. Unknown names produce RecipeStep::Other.
Sourcepub fn display_name(&self) -> &str
pub fn display_name(&self) -> &str
Short display name for reporting / traceability manifests.
Trait Implementations§
Source§impl Clone for RecipeStep
impl Clone for RecipeStep
Source§fn clone(&self) -> RecipeStep
fn clone(&self) -> RecipeStep
1.0.0 · Source§fn clone_from(&mut self, source: &Self)
fn clone_from(&mut self, source: &Self)
source. Read moreSource§impl Debug for RecipeStep
impl Debug for RecipeStep
Source§impl Default for RecipeStep
impl Default for RecipeStep
Source§impl<'de> Deserialize<'de> for RecipeStep
impl<'de> Deserialize<'de> for RecipeStep
Source§fn deserialize<__D>(__deserializer: __D) -> Result<Self, __D::Error>where
__D: Deserializer<'de>,
fn deserialize<__D>(__deserializer: __D) -> Result<Self, __D::Error>where
__D: Deserializer<'de>,
Source§impl Hash for RecipeStep
impl Hash for RecipeStep
Source§impl PartialEq for RecipeStep
impl PartialEq for RecipeStep
Source§impl Serialize for RecipeStep
impl Serialize for RecipeStep
impl Eq for RecipeStep
impl StructuralPartialEq for RecipeStep
Auto Trait Implementations§
impl Freeze for RecipeStep
impl RefUnwindSafe for RecipeStep
impl Send for RecipeStep
impl Sync for RecipeStep
impl Unpin for RecipeStep
impl UnsafeUnpin for RecipeStep
impl UnwindSafe for RecipeStep
Blanket Implementations§
Source§impl<T> BorrowMut<T> for Twhere
T: ?Sized,
impl<T> BorrowMut<T> for Twhere
T: ?Sized,
Source§fn borrow_mut(&mut self) -> &mut T
fn borrow_mut(&mut self) -> &mut T
Source§impl<T> CloneToUninit for Twhere
T: Clone,
impl<T> CloneToUninit for Twhere
T: Clone,
Source§impl<Q, K> Equivalent<K> for Q
impl<Q, K> Equivalent<K> for Q
Source§impl<Q, K> Equivalent<K> for Q
impl<Q, K> Equivalent<K> for Q
Source§fn equivalent(&self, key: &K) -> bool
fn equivalent(&self, key: &K) -> bool
key and return true if they are equal.