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Module process_context

Module process_context 

Source
Expand description

Recipe-step and tool-state context for admissibility gating.

§Step-Indexed Admissibility

The DSFB admissibility envelope radius ρ is not a global constant. Industry practice demands that tolerance bands vary with the process recipe step: a ±5 % gas-flow deviation is expected during a “Gas Stabilise” ramp, but the same deviation during “Main Etch” constitutes an out-of-control condition.

This module encodes that domain knowledge as a look-up table (LUT) keyed on RecipeStep. The LUT multiplier is applied to the feature-level ρ values before the grammar layer evaluates admissibility.

§Maintenance Hysteresis

Upon receipt of a ToolState::ChamberClean signal the engine executes a “Warm Reset”: accumulated grammar state is cleared and a configurable guard window suppresses new alarms for the first post_clean_guard_runs runs after clean completion. This prevents false escalations during the seasoning period that follows every chamber clean.

§No-std Compatibility

This module is no_std-compatible with alloc.

Structs§

MaintenanceHysteresis
Tracks the hysteresis boundary around chamber-clean and seasoning events.
ProcessContext
Full operational context for a single process run, passed to the DSFB engine so that admissibility gating is recipe-step-aware.

Enums§

RecipeStep
Canonical set of recipe steps recognised by the DSFB engine.
ToolState
Observable tool-level state that may suppress or modulate the grammar engine.