Expand description
Recipe-step and tool-state context for admissibility gating.
§Step-Indexed Admissibility
The DSFB admissibility envelope radius ρ is not a global constant. Industry practice demands that tolerance bands vary with the process recipe step: a ±5 % gas-flow deviation is expected during a “Gas Stabilise” ramp, but the same deviation during “Main Etch” constitutes an out-of-control condition.
This module encodes that domain knowledge as a look-up table (LUT)
keyed on RecipeStep. The LUT multiplier is applied to the
feature-level ρ values before the grammar layer evaluates admissibility.
§Maintenance Hysteresis
Upon receipt of a ToolState::ChamberClean signal the engine
executes a “Warm Reset”: accumulated grammar state is cleared and
a configurable guard window suppresses new alarms for the first
post_clean_guard_runs runs after clean completion. This prevents
false escalations during the seasoning period that follows every
chamber clean.
§No-std Compatibility
This module is no_std-compatible with alloc.
Structs§
- Maintenance
Hysteresis - Tracks the hysteresis boundary around chamber-clean and seasoning events.
- Process
Context - Full operational context for a single process run, passed to the DSFB engine so that admissibility gating is recipe-step-aware.
Enums§
- Recipe
Step - Canonical set of recipe steps recognised by the DSFB engine.
- Tool
State - Observable tool-level state that may suppress or modulate the grammar engine.