Crate semi_e5

Crate semi_e5 

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§SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 (SECS-II) MESSAGE CONTENT

Copyright © 2024 Nathaniel Hardesty, Licensed under the MIT License

This software is created by a third-party and not endorsed or supported by SEMI.

The codebase will be updated to reflect more up-to-date SEMI standards if/when they can be acquired for this purpose.

Based on:

SECS-II is a protocol designed to facilitate a common syntactic and semantic message structure used in communications between semiconductor equipment.

Most commonly, the HSMS (SEMI E37) or SECS-I (SEMI E4) protocols are used to transmit SECS-II formatted messages.

Most commonly, the GEM (SEMI E30) and OSS (SEMI E39) protocols are used to integrate host/equipment communication and behavior using SECS-II messages.

§TO BE DONE

  • Implement “Localized” strings.
  • Finish adding items.
  • Add messages to Streams 3 through 21.

§REFERENCED STANDARDS

  • SEMI E4 - SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
  • SEMI E6 - Guide for Semiconductor Equipment Installation Documentation
  • SEMI E37 - High-Speed SECS Message Services (HSMS) Generic Services
  • SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object
  • ANSI X3.4-1977 - Code for Information Interchange (ASCII)
  • IEEE 754 - Standards for Binary Floating Point Arithmetic
  • JIS-6226 - JIS 8-bit Coded Character Set for Information Exchange

Modules§

format
ITEM FORMAT
items
ITEMS
messages
MESSAGES
units
UNITS OF MEASURE

Structs§

Message
GENERIC MESSAGE

Enums§

Error
DATA CONVERSION ERROR
Item
GENERIC ITEM
LocalizedStringHeader
LOCALIZED STRING HEADER